Dispersion of the casting replication process for microfluidic structures

摘要

This paper presents a study of the dispersion of the casting replication process using SU-8 master structures. Samples of master structures and replicated microfluidics test structures are fabricated. The resulted master and replicated structures are measured. By experimental observations and by statistical analysis it is shown that the casting replication method has the same dispersion as the fabrication process of the used master structures.