MEMS wind speed sensor: From turbulence fluid flow and piezoelectric mathematical model to numerical simulation device response

摘要

In this article we propose a sensor model for the fluid speed detection. The sensor is made up of a piezoelectric component and a passive component, whose geometry can be adjusted depending on the fluid properties in order to obtain the response characteristics in an imposed domain. The aim of the article is to design a piezoelectric device and to study, using a mathematical model, the device response when its surface interacts with a fluid flow. We describe a turbulent wind flow model of a compressible fluid using the Reynolds-Averaged Navier-Stokes equation and the piezoelectric device mechanical behavior using a solid mechanic linear constitutive stress tensor and strain tensor equations subsystem.