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A low cost solution for the fabrication of dielectrophoretic microfluidic devices and embedded electrodes

机译:用于制造介电泳微流体器件和嵌入式电极的低成本解决方案

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The versatility of a simple method for producing microfluidic devices with embedded electrodes is demonstrated through the fabrication and operation of two dielectrophoretic devices; one employing interdigitated electrode structures on glass and the other employing contactless electrode reservoirs. Device manufacture is based on the precipitation of silver and subsequent photolithography of thin film resists conducted outside of a cleanroom environment. In current experiments, minimum channel widths of 50 microns and electrode widths of 25 microns are achieved when the distance between features is 40 microns or greater. These results illustrate this technique's potential to produce microfluidic devices with embedded electrodes for lab on chip applications while significantly reducing fabrication expense.
机译:通过两个介电电泳设备的制造和操作,证明了一种用于生产带有嵌入式电极的微流控设备的简单方法的多功能性。一种采用玻璃上的叉指式电极结构,另一种采用非接触式电极容器。器件的制造基于银的沉淀以及随后在无尘室环境之外进行的薄膜抗蚀剂的光刻工艺。在当前的实验中,当特征之间的距离为40微米或更大时,最小通道宽度为50微米,电极宽度为25微米。这些结果说明了该技术在生产用于芯片实验室的嵌入式电极微流控器件方面的潜力,同时大大降低了制造成本。

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