LOW COST / HIGH QUALITY SILICON PRODUCTION BY CENTRIFUGE CVD REACTOR UPSCALED AND HOT HARVEST

摘要

Dynatec has earlier reported findings from a novel patented design of a rotating CVD chamber for production of polysilicon by decomposition of monosilane. The results presented here are from the second generation of the reactor type with higher capacity and possibility to harvest produced silicon without cooling the reactor. This is the first reactor in the world capable of converting about 98% of the inserted monosilane into high quality dense crystalline silicon without fines. Results and overall design is presented.