SILICON HETEROJUNCTION SOLAR CELL DEVELOPMENT WITH THE PRIMELINE HJT PLATFORM AT ROTH RAU

摘要

The interest in heterojunction (HJ) solar cells made with a crystalline silicon (c-Si) absorber and dopedhydrogenated amorphous silicon (a-Si:H) layers as emitter and back surface field is growing, lately mainly inexpanding further this cell technology in mass production. This technology is very convenient because it is suited forhigh efficiency solar cell concepts. The advantage of HJ technology is a low temperature process and convenientproduction costs because long thermal processes are replaced with fast low temperature plasma deposition processes.HJ technology is also promising for future applications on very thin wafers or c-Si foils: in this case the standardtechnology which is so far in mass production is not at all applicable, and novel technologies based on thermalprocesses would be problematic as well. Excellent results with HJ have been achieved in a research line at Roth&Rau(R&R) in Neuchatel/Switzerland, and the same process has been transferred very fast and successfully in a pilot linewith production tools with a standard industrial throughput of 2400 Wafers/hour at R&R in Hohenstein/Germany.Efficiency of 21,5% have been achieved on small cells, and over 20% also on Cz c-Si wafers of 5 and 6 inch size.Module encapsulation is also at a very advanced state.