Fabrication and evaluation of polymer MEMS mirror based on the mechanical characteristic of polymer containing magnetic particles

摘要

In this study, we have evaluated the mechanical characteristic and the attractive force of the SU-8 containing magnetic particles. Then, we have fabricated the mirror device based on the mechanical characteristic of the polymer and evaluated the deflection characteristic. Two kinds of the mirror devices composed of SU-8 containing Fe2O3 (particle size: p.s.5μm) and Fe3O4 (p.s.5μm) particles are fabricated and evaluated. The optical deflection angles of both devices are ±20° in a small current. Then, we confirmed the possibility to realize the low cost and large deflection angle polymer MEMS mirror using SU-8 containing magnetic particles.