Electrode and Electrolyte Layers for Solid Oxide Fuel Cells Applied by Physical Vapor Deposition (PVD)

摘要

Physical vapor deposition (PVD) technologies allow for a variety of microstructural morphologies. PVD is especially qualified for the production of dense ceramic layers at comparatively moderate substrate temperatures. This paper discusses the physical vapor deposition of SOFC functional layers, comprising perovskites, NiO/8YSZ and composite electrolyte layers, with a thickness between 300 nanometres and several micrometres and lateral dimensions of 100 mm-100 mm. Magnetron sputtering and electron beam evaporation were used as PVD techniques, with and without additional ion bombardment of the layers during deposition. Scanning electron microscopy analysis revealed that an additional ion bombardment during layer growth increasingly promotes the creation of continuous and dense layer morphology instead of a columnar microstructure.