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Relationship Between Microstructure and Hardness of ZrN/TiN Multi-Layers with Various Bilayer Thicknesses

机译：不同双层厚度的ZrN / TiN多层薄膜的显微组织与硬度的关系

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摘要

ZrN/TiN multi-layers were synthesized by ion beam sputtering technique. Microstructure and mechanical property of the ZrN/TiN multi-layers were characterized and the relationships between microstructure and hardness of the ZrN/TiN multi-layers with various bilayer thicknesses and thickness ratios were investigated. The microstructure of multi-layers have been investigated using transmission electron microscope (TEM) and X-ray diffraction (XRD).

机译：通过离子束溅射技术合成了ZrN / TiN多层膜。表征了ZrN / TiN多层膜的显微组织和力学性能，研究了ZrN / TiN多层膜的双层厚度和厚度比与显微组织和硬度之间的关系。多层的微观结构已使用透射电子显微镜（TEM）和X射线衍射（XRD）进行了研究。

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来源
《International ceramics congress 》|2011年|p.392-395|共4页
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作者
Yoshifumi Aoi; Satoru Furuhata; Hiromi Nakano;
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正文语种
中图分类陶瓷工业 ;
关键词
multi-layers; zrn/tin; microstructure; hardness; ion beam sputtering;

机译：多层zrn / tin;微观结构硬度;离子束溅射;

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1. Microstructure, hardness and corrosion resistance of ZrN films prepared by inductively coupled plasma enhanced RF magnetron sputtering [J] . Liu F, Meng YD, Ren ZX, Plasma Science & Technology . 2008 ,第2期

机译：电感耦合等离子体增强射频磁控溅射制备ZrN薄膜的组织，硬度和耐蚀性
2. Microstructure, Hardness and Corrosion Resistance of ZrN Films Prepared by Inductively Coupled Plasma Enhanced RF Magnetron Sputtering [J] . 刘峰, 孟月东, 任兆杏, 等离子体科学和技术：英文版 . 2008 ,第002期

机译：电感耦合等离子增强射频磁控溅射制备ZrN薄膜的组织，硬度和耐蚀性
3. Microstructure, Hardness and Corrosion Resistance of ZrN Films Prepared by Inductively Coupled Plasma Enhanced RF Magnetron Sputtering [J] . LIU Feng, MENG Yuedong, REN Zhaoxing, 等离子体科学和技术（英文版） . 2008 ,第002期
4. Relationship Between Microstructure and Hardness of ZrN/TiN Multi-Layers with Various Bilayer Thicknesses [C] . Yoshifumi Aoi, Satoru Furuhata, Hiromi Nakano International ceramics congress . 2011

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Relationship Between Microstructure and Hardness of ZrN/TiN Multi-Layers with Various Bilayer Thicknesses

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