Development of Hybrid Type Pneumatic Vibration Isolation Table by Piezo-stack Actuator and Filtered-X LMS Algorithm

摘要

Recently, vibration requirements are getting stricter as precise equipments need more improved vibration environment to realize their powerful performance. Though the passive pneumatic vibration isolation tables are frequently used to satisfy the rigorous vibration requirements, the specific vibration problem, especially continuous sinusoidal or periodic vibration induced by a rotor system of other precise equipment, a thermo-hygrostat or a ventilation system, is still left. In this research, the application procedure of Filtered-X LMS algorithm to pneumatic vibration isolation table with piezo-stack actuators is proposed to enhance the isolation performance for the continuous sinusoidal or periodic vibration. In addition, the experimental results to show the isolation performance of proposed system are also presented together with the isolation performance of passive pneumatic isolation table.