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Aluminum oxide layer formation via PEALD for enhancement Of barrier properties of plastic substrates

机译:通过PEALD形成氧化铝层以增强塑料基材的阻隔性能

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Aluminum oxide layers were successfully deposited on plastic substrates via plasma enhanced atomic layer deposition (PEALD) process using trimethylaluminum (TMA) and oxygen Several process parameters in PEALD process were optimized. Thin and densely packed aluminum oxide layers deposited via PEALD showed the potentials as promising barrier coating layers for plastic substrates.
机译:使用三甲基铝(TMA)和氧气通过等离子增强原子层沉积(PEALD)工艺成功地在塑料基材上沉积了氧化铝层。通过PEALD沉积的薄而密堆积的氧化铝层显示出作为塑料基材有希望的阻隔涂层的潜力。

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