Poly (ethylene terephthalate) (PET) microanostructures fabricated by nanoimprint and its applications

摘要

In this paper, we present a novel method for the fabrication of high density pattern in PET foils employing nanoimprint lithorgraphy. The temperature and pressure dependence on the imprinted pattern were investigated. Well resolved PET nanopatterns (sub-100nm resolution) were transferred successfully. It is observed that the grating with different trench depths will demonstrates corresponding changes of diffraction intensity distribution. The grating imprinted in PET foils could broader applications in the manufacture of nanophotonic structures owing to its excellent flexibility and transparency. Based on the optimized imprint process, a novel method for the fabrication of phase gratings and nanochannels is presented. This developed process can find broader applications in the manufacture of nanofluidic channels and other nanophotonic structures.