Measurement Method of Multi-degree-freedom Based on Laser Collimation Principle

摘要

A five-degree-of-freedom (including two displace errors and three angular errors) online measuring system is proposed. Two mutually perpendicular prisms are fixed on a workbench of guideway and move along with the workbench. The measuring system consists of two independent left path and right path with same light structure and principle. The principle of displacement and angular measurement is analyzed, and optical structure is established. The system has many advantages such as small and simple structure, high-precision and cheap cost.