Error mechanism analyses of an ultra-precision stage for high speed scan motion over a large stroke

摘要

Reticle Stage (RS) is designed to complete scan motion with high speed in nanometer-scale over a large stroke. Comparing with the allowable scan accuracy of a few nanometers, errors caused by any internal or external disturbances are critical and must not be ignored, hi this paper, RS is firstly introduced in aspects of mechanical structure, forms of motion, and controlling method. Based on that, mechanisms of disturbances transferred to final servo-related error in scan direction are analyzed, including feedforward error, coupling between the large stroke stage (LS) and the short stroke stage (SS), and movement of measurement reference. Especially, different forms of coupling between SS and LS are discussed in detail. After theoretical analysis above, the contributions of these disturbances to final error are simulated numerically. The residual positioning error caused by feedforward error in acceleration process is about 2 nm after settling time, the coupling between SS and LS about 2.19 nm, and the movements of MF about 0.6 nm.