Error Analysis and Correction of Grating Interference Displacement Measurement System

摘要

Main error source, error characteristics and its correction method have a detailed analysis of the grating interference displacement measuring system in this paper. Through the error separation and compensation method, its system error is modified. Random error is separated through frequency spectrum analysis method. Experimental results show that, the system accuracy can be improved from micron or submicron magnitude to nanometer level by these error correction methods. This system can realize nanometer level measurement.