Design of Co-path Scanning Long Trace Profiler for Measurement of X-ray Space Optical Elements

摘要

The Long Trace Profiler (LTP) is a precision surface slope error measurement instrument used in synchrotron radiation optics for many years. By making some modifications to the LTP system, we developed a co-path scanning LTP (CSLTP) system to test the cylindrical aspherical surface which used in X-ray space optics. To reduce the mistake caused by air turbulence and manufacture faults of optical elements used, the CSLTP is designed with the least difference between the testing beam path and the reference beam path. Also, it uses multiple-beam interference but double beam interference to reduce the width of beam fringe. This improves the position precision of the beam fringe on the image plane.