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FEM Simulations and Experiments for HF Induction Heater of Multi-core Silicon Core Crystal Growth Furnace

机译:多芯硅芯晶体生长炉高频感应加热装置的有限元模拟与实验

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This passage proposes to investigate the silicon core crystal growth furnace, which is used to produce silicon core of monocry stalline silicon. 3D modeling and simulation of the advanced HF induction heater were obtained by ANSYS. The skin effect and the distribution of electromagnetic field are described clearly. The results demonstrate that the FEM analysis results inosculate with the theories and experimental results very well. This method is practically significant for improvements and adjustments of the HF induction heater in silicon core crystal growth furnace.
机译:本文旨在研究硅核晶体生长炉,该炉用于生产单晶的档位硅的硅核。通过ANSYS获得了先进的HF感应加热器的3D建模和仿真。皮肤效应和电磁场的分布清楚地描述了。结果表明,有限元分析结果与理论和实验结果相吻合。该方法对于改进和调整硅芯晶体生长炉中的HF感应加热器具有实际意义。

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