Influence of Deposition Parameters on the Characteristics of AZOY Transparent Conducting Oxide Thin Film

摘要

"GfE Coating Materials Company" had developed a novel AZOY transparent conducting oxide (TCO) material that used ZnO as raw material and contained a small amount of Y2O3 and Al2O3.In this study,the AZOY material developed by GfE company is used as the based TCO material and we will develop the influences of substrate temperatures on the characteristics of AZOY TCO films by RF sputtering method,under optimal O2/argon ratio and depositing pressure.After deposition,the sheet resistance of AZOY films is measured with a four point probe,and surface morphology and cross-sections are studied using a field emission scanning electron microscope (FESEM).And finally,the UV-Vis spectrophotometer is used to find the transmittance of AZOY TCO films.