Structure study of cadmium tin oxide thin-films prepared by linear combinatorial synthesis

摘要

Thin films of transparent conducting cadmium tin oxide were produced by linear combinatorial synthesis using low-pressure metal-organic chemical vapor deposition. Different decomposition temperatures of Sn and Cd metal-organic precursors were used to achieve the composition variation. The structural properties varied with the composition along the gas flow direction, cubic CdO, spinel Cd2SnO4, amorphous, and finally the tetragonal SnO2 structure was observed with the optical bandgap of the films increasing from ∼2.7 to 3.65 eV. The highest electron mobility was achieved within the amorphous phase, at a composition range of Cd-to-Sn of 2-to-1∼1-to-1.