A microfabricated icp source and its application in miniaturization of spectrometer

摘要

A novel microfabricated inductively coupled plasma (ICP) source is introduced, which is an atomic emission spectrum excitation source. Its radio frequency power loss, size and Argon consumption are far less than one percent of atmospheric pressure ICP source. The micro ICP source is based on MEMS technology, its working gas is Argon at 100Pa. The configuration and characteristics of the micro ICP source are described. The application of the source in spectrometers is illustrated, it is intended to be used in conjunction with a planar miniature Fabry-Perot spectrometer to form a micro gas analyzer. A micro ICP source developed by author is introduced briefly, which work at 13.56MHz. At last, with the development of MEMS technology, the potential application areas of micro gas analyzer is presented.