The Laboratoire National de Metrologie et d'Essais (LNE) is in charge of developing a French national expertise in dimensional nanometrology. Many industries and research laboratories use SPMs and need to calibrate their instruments. It's done thanks to reference samples, whose dimensional characteristics are calibrated by a National Metrological Institute (NMI). Up to now, no French institute provides that kind of calibration. Within this context, LNE develops a home-made metrological AFM whose measurements are traceable to the national length standard. The displacement range will be 50 urn for X and Y axis and about 10 μm for Z axis. For the measurement of the tip position relative to the sample, the expected uncertainty is about 1 nm. The paper will focus on the original design of our metrological AFM.
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