The aim of the study was to achieve traeeability for micrometre-range surface roughness measurements made with a stylus instrument. Profile of the same sawtooth surface roughness standard of ISO type B was measured with both a metrology atomic force microscope (MAFM) and a stylus instrument. The effect of a larger tip size of the stylus instrument was corrected. The results for amplitude and wavelength were in good agreement, providing confidence for the measurement area of the instrument used for micrometre-range calibrations. The deviation at an amplitude of 1.5 μm was 27 nm.
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