Design of Inner Wedge- form Tool in Precision Recycle of Digital Paper Display

摘要

The low yield of ITO thin film deposition is an important factor in optoelectronic semiconductor production. A recycle fabrication module uses micro electroremoving as a precision machining process with a new design of inner wedge-form tool to remove the defective Indium-tin-oxide (ITO) nanostructure from the optical PET surfaces of digital paper display is presented in current studies. The adopted precision recycle process requires only a short period of time to remove the ITO nanostructure easily and cleanly is based on technical and economical considerations and is highly efficient. In the current experiment, a higher feed rate of the optical PET diaphragm combines with enough electric power to drive fast micro electroremoving. A large slant angle of the cathode and a small arc rounding radius of the anode takes less time for the same amount of ITO removal. High rotational speed of the electrodes can improve the effect of dregs discharge and is advantageous to associate with the fast feed rate of the workpiece (optical PET diaphragm). A small rotational diameter of the anode accompanied by a small width of the cathode corresponds to a higher removal rate for the ITO nanostructure.