Micromirrors with large scan ranges,large aperture sizes,fast speeds,low voltages and low cost are needed for optical switching,displays and biomedical imaging,but it is very challenging to simultaneously meet all the requirements. This paper introduces electrothermal bimorph based micromirrors that can overcome the challenge. For example,a large-vertical-displacement (LVD) micromirror scans 0.7mm vertically at less than 25Vdc. A lateral-shift-free (LSF) LVD generates a piston motion of 0.6mm and scans more than 30° about two axes at less than 8Vdc. An inverted-series-connected (ISC) micromirror scans ±30° about two axes with no rotation axis shifts. All these mirrors have an optical aperture of 1 mm. Their resonant frequencies range from 300Hz to 2kHz. Some of these micromirrors have been applied in biomedical imaging applications.
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