Design and analysis of a working mechanism for optical machining

摘要

In order to fabricate large aperture optical aspheric mirrors/lenses with nanometer shape accuracy, computer-controlled grinding and polishing processes are necessary. However, large work-piece usually has a relative high weight and size, which is inconveniently to perform interferometric testing during fabrication. A novel machining tool with five-axis and work-piece table vertical overturning setup is proposed, which is designed with the functions of both grinding and polishing, and characterized as on-machine testing mechanism. Analysis aims on the structure and stability indicates the designed machine with reasonable parameters and with the potential of making high quality optical mirrors or lenses.