The vibration control of a turbomolecular vacuum pump presents several methodological and implementation peculiarities that make the design of an efficient controller difficult. In this manuscript the effects of system uncertainties and numerical implementation issues are discussed with reference to both feedback and feedforward active vibration control schemes. The feedback schemes are based on direct discrete-time notch filter design, while the feedforward schemes rely on adaptive noise canceling algorithms. Simulation experiments derived on an accurate model of the plant (constituted by the pump and the damper) are provided to evaluate and compare the proposed control design solutions.
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