Cleaning of ITO Glass with Carbon Dioxide Snow Jet Spray

摘要

ITO glass cleaning is LCD, OLED and other flat panel display industry's key technologies. At present, the usual wet cleaning technology consumes large amount of water and chemicals, and produces a large amount of contaminant venting. CO_2 snow jet spray cleaning has been successfully applied to cleaning the surface of semiconductor chip, vacuum devices and space telescopes. Surface cleaning of indium tin oxide (ITO) film was carried out with carbon dioxide snow jet treatment .Based on the measurements of the contact angles, X-ray photoelectron spectroscopy and scanning electron microscopy (SEM) ,the influence of carbon dioxide snow jet treatment on surface cleaning of indium tin Oxide film was investigated and compared with the samples of low frequency immersion ultrasonic cleaning. Experimental data show that the carbon dioxide snow jet treatment effectively removes particulate and hydrocarbon on ITO surface.