Fiber micro-vibration readout sensor based on MOEMS

摘要

To measure the vibration of micro-structure, a scheme of sensor based on MOEMS (Micro-Optic-Electro-Mechanical System) with fiber-optic readout was proposed , and its mathematical model was deduced. Single-fiber readout structure and a micro-structure fixed in the front of the sensor were used. The micro-structure vibrated as the measured object moved, and its vibration caused the change of light intensity. The sensor detected vibration displacement by receiving the light intensity. As a result of single-fiber structure and parameters optimization of micro-structure, compared with other fiber readout structures, this system has the advantages of high sensitivity and miniaturization which is easier to match with fiber system because of single-fiber structure and parameters optimization of micro-structure. The response behaviors of the system to the piezoelectric ceramics excitation were studied through the experiments. And it could detect the vibration displacement of 0.18nm.