Real-time phase correction of optical images using adaptive optics system based on MEMS technology

摘要

The possibility of compensating the wave-front distortion of an optical imaging system in real time has been a subject of considerable interest. To compensate the wave-front aberration resulted by atmospheric turbulence, random gravity, heat and component surface error during manufacturing, adaptive optics is an effective way. But conventional adaptive optics has not found widespread acceptance outside the high-end astronomy community due to the cost and complexity. With the development of micro-electro-mechanical systems (MEMS) based on silicon micromaching technology, it is possible to develop a low-cost adaptive optics system. In this paper we will describe a micro-adaptive imaging system that has proved the practical feasibility of real time optical phase correction. As a key component in our adaptive optics system, a novel silicon bulk micromaching deformable mirror was used to compensate the wave-front aberration of optical image . The laboratory experiments are also presented to reveal the benefit that such system can provide. Future possible improvements are addressed as well.