Development of laser-assisted microfabrication system for three-dimensional metal structures by photocatalysis

摘要

The object of the present research is to develop a new concept of micromachining technique based on photocatalysis, which allows us to fabricate three-dimensional (3-D) metal microstructures. This paper describes the design and development of an experimental microfabrication system based on this proposed method. And several fundamental experiments for fabricating the 3-D microstructures made of silver such as micro wire-framed 3-D structure, micro-rotor with the size scale of several 10 μm confirmed the feasibility of the proposed method.