Study on thermal analysis of polishing optical mirror surface

摘要

Heat generated during polishing optical mirror surface is studied referring to tribology theory in this paper. The formula shows that the main factors of affecting heat generated include: rotating speed of polishing tool and mirror ω, load applied by polishing tool P, size of powder, and the material of mirror. Given the experiential value of parameters in the formula, heat generated by polishing are worked out. Based on the working-out result, thermal field, deformation and stress field of the polishing mirror are gotten by use of Finite Element Analysis software ANSYS. ANSYS's analysis shows the max deformation is 1.08μm on the being polished area.