Surface Temperature Measurements in Microscale withTemperature Sensitive Fluorescent Dye

摘要

A technique for measuring surface temperature field in microscale is newly proposed, which usestemperature-sensitive fluorescent (TSF) dye coated on the surface and is easily implemented with afluorescence microscope and a CCD camera. The TSF dye is chosen among mixtures of variouschemical compositions including rhodamine B as the fluorescent dye to be most sensitive totemperature change. In order to examine the effectiveness of this temperature measurement technique,numerical analysis and experiment on transient conduction heat transfer for two different substratematerials, I. E., silicon and glass, are performed. In the experiment, to measure the temperatureaccurately with high-resolution temperature calibration curves were obtained with very fine spatialunits. The experimental results agree qualitatively well with the numerical data in the silicon and glasssubstrate cases so that the present temperature measurement method proves to be quite reliable. Inaddition, it is noteworthy that the glass substrate is more appropriate to be used as thermally-insulatinglocal heating heater in micro thermal devices. This fact is identified in the temperature measuringexperiment on the local heating heaters made on the wafer of silicon and glass substrates.Accordingly, this technique is capable of accurate and non-intrusive high-resolution measurement oftemperature field in microscale.