A static model for analyzing a micro-machined switch consisting of a cantilever beam is presented. This model divides the deformation of the cantilever beam subjected to both the Casimir force and the electrostatic force into three stages:the first is a cantilever beam subjected to the Casimir force and the electrostatic forcer;the second is a beam built in at one end and simply supported at the other;the third is a beam subjected to the Casimir force,the electrostatic force and a concentrated force with a given displacement and a zero angle of rotation at its free end. The reaction force at the simply supported end at the second stage and the concentrated force and its position at the third stage are related with the applied voltage. In the example,some results are given,and the effect of the Casimir force is analyzed,from which some beneficial conclusions can be obtained.
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