The Model And Simulation of Differential Frequency Micromechanical Accelerometer

摘要

In this paper we introduce an novel structure of differentail frequency micro- mechanical accelerometer which designed by the basic phsics principle of simple pendulum and the operating principle of gyroscopes. This accelerameter has an advantage that is the frequency of output signal of accelero- meter is cooresponding to the outside acce- leromete directly, so it can achieve good performance. We model and simulate the tructure of accelerometer, then we approved that the design of accelerometer’s structure is appropriate by the result of finite element analysis，and we get a ideal structure of differential frequency micromechanical accelerometer.