THODS OF MMIC AND MEMS ANALYSIS

摘要

Unlike HMICs, MMIC and MEMS performances cannot be easily "tuned" by adjusting lumped or distributed elements. Once the circuit is processed, its performance is, for the most part, set. Therefore, the design of the MMIC must be based on accurate physical and electrical models for both the passive and active elements, including effects due to manufacturing process tolerances. This design process uses powerful interactive software programs for the synthesis, analysis, and layout of linear and nonlinear circuits. This paper introduces the methods of MMIC and MEMS analysis including the global circuit simulation and the global EM simulation. The recent coupling approaches for the full-wave electromagnetics (Ems) with the carrier transport and thermal effects are also introduced.