Six degrees of freedom Table for nanometric displacement by means of magnetic actuators

摘要

This paper presents the design, development and evaluation of a high precision positioning stage suspended magnetically with six degrees of freedom (dof). Application of the technology of magnetic suspension by means of electromagnetic actuators to allow, by means of feedback loops, forces and position control of a cube with a capacity of controlled positioning in a 200 μm range with 10nm positioning resolution and 50 nrad resolution. Design of stage was optimized by electromagnetic and mechanical finite element modeling (FEM).