Additional Error Sources for Microscopic Laser-Doppler Measurements

摘要

Laser-Doppler Vibrometry has been proven to be an accurate method to measure vibration amplitudes with a known error budget. Therefore, vibrometer technique is used to realize primary standards in vibration-amplitude measurements at national metrology institutes (e.g. Physikalisch Technische Bundesanstalt PTB in Germany). However, additional error sources emerge for vibrometer measurements at microscopic structures. This paper discusses two error sources that can be neglected for usual macroscopic testing but can become important for microscopic measurements.