High power RF excited planar waveguide carbon dioxide lasers for microprocessing applications

摘要

We review progress in the development of a novel mode of operation of the planar waveguide carbon dioxide laser (referred to as the ultra-super-pulse or USP mode), which is capable of delivering, at high efficiency, up to ten times higher peak power and up to ten times shorter pulse duration than the 'conventional' planar waveguide laser. These enhanced bream properties extend the range of applications to micro-processing of materials with higher machining threshold and/or low absorption coefficients and with the added advantage of producing reduced heat affected zone.