Three-Dimensional CMP Process Model for Composite Film with Periodic Patterns by BEM

摘要

This paper proposes a three-dimensional CMP process model for composite film with periodic patterns by BEM. This model allows us to understand the behavior of the composite film's removal rate and its dependence on pattern size. We will show that we can use the distribution law of Preston's coefficients of the composite films for the periodic patterns which are smaller than the boundary element size and demonstrate the die-scale simulation with efficiency.