The Application of Automatic Parallel Fracturing System on Hierarchical and Large Data Structure

摘要

To enable efficient transformation of layout data to Electron Beam (EB) lithography drawing data in production, we have developed an automatic parallel-processing fracturing system named Tribune. Tribune can effectively use both parallel and hierarchical processing together to maximize the fracturing performance to easily handle large amount of layout data. Tribune is designed to effectively use both parallel and hierarchical methods with the aid of cell information known by layout designers. A new fracturing algorithm is employed which fractures patterns whose width is wider than specified critical dimensions to minimize the number of tiny geometries for the improvement of pattern fidelity.