Design of 2D Monolithic Ultra-micropositioning Mechanism and System with Nanometer Resolution

摘要

A 2-D monolithic ultra-micropositioning mechanism in which piezoelectric ceramic actuator and flexure hinge are used is presented in the paper, and the 2-D monolithic ultra-micropositioning mechanism and its feedback control system are proposed. The experiment shows that positioning accuracy of system is 10nm within 10μm range, with a positioning resolution of 3nm.