Bi-directional linear magnetron arc cathode

摘要

Extended deposition sources are useful for large area coating and high volume production. W have developed a bi-directional arc evaporation cathode having two oppositely facing ouput streams. The cathode has the shape of a rectangular bar, with erosion occurring around the periphery (along 2 opposite long sides and both ends). The magnetic field con-figuration allows uniform erosion across the entire target width, providig god target utilization. The arc circulates continu-ously around the cathode without need for active control means. Side shielding is used to reduce low-angle macroparicle emission. The cathode is suitable for use as an axial source in batch coating systems, and prermits a dual sub-strate stream in linear throughput systems.