MoO_3: A Novel Material for Detection of Environmental Pollutants

摘要

Thin films of MoO_3 have been prepared by r.f. sputtering and structurally characterized as a suitable material for gas-sensing applications. Details concerning preparation of the sensing layers are reported. Investigation of the structural features of the films is carried out by means of electron microscopy and X-ray Diffraction techniques showing the feasbility of the film for gas sensing applications. The sensing behaviour of the Mo-O film was tested to either oxidizing or reducing gases and perspectives of employment in environmental pollution monitoring are opened up for this layer.