DESIGN, FABRICATION AND CHARACTERIZATION OF A MICROACTUATOR FOR NEBULIZATION OF FLUIDS

摘要

This article deals with basic investigations of the development and manufacturing process of a piezoelectric driven microactuator for nebulization of fluids. The concept of the fabrication of the micronebulizer will be introduced. First fundamental investigations on materials characterization and process technology for the electrodes and piezoelectric AlN layers will be presented. AlN thin films have been depositetd by reactive sputtering technique and have been characterized with dielectric and ferroelectric measurements.