New application of medium frequency sputtering for large area coating

摘要

Medium frequency suttering is a new technology with a great many applications in large area coating. With generators of up to 200 kW now available, large area reactive deposition of dielectric (antireflective) and condictive (antistatic) coatings at reasonable cost is possible. The operation of medium frequency sine w ave generators as a power supply for dual mangetrons of planar and cylindrical geometry's is investigated in detail. Results obtained with generators in the power range from 10 kW up to 200 kW are presented. THe operating frequency depends on the process requirements and covers the range from 20 kHz to 100 kHz. Special efforts have been made to improve arc suppression for different processes. Our practical results have been obtained at large area, industrial coating production facilities for lass and web coating, as well as for CRT display deposition equaipment where new thin film layers have been created with new materials.