System Improvements and Discussion to Minimize Lightning Arcs or Crazing

摘要

The technology exists to advance film properties and improve throughput in large area systems. However, defects caused by system limitations prevent implementation of new process capabilities. Using the electrical models that show the causes of the lightning arc events, system design recommendations have been identified, implemented, and proven to be effective. Several system design recommendations are proposed to minimize the unintended current paths in large area systems and the reason they are effective.