Five $mu@m silica particles can be arranged on CaTiO$-3$/ substrates by drawing an electrified pattern on the substrate (drawing step) and then dipping it in a suspension of the particles (arranging step). The fixing treatment of the arranged particles is necessary in order to repeat the above two steps and to fabricate 3D micro-structures. A thin film of the fluoride polymer is formed on the substrate after the particle arrangement to fix the arranged particles. The effect of the coating film on the drawing step and arranging step was studied. It was found that the coating film improved both steps rather than cause interference. The drawing, arranging and fixing are the elemental techniques of the particle arrangement process, and 3D micro-structures can be constructed by repeating these steps in order. Application of the process to a gas sensor was discussed.
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机译：通过在基板上拉动电气化图案（拉图步骤）然后将其浸入颗粒（布置步骤）的悬浮液中，可以在Catio $-3 $ /基板上布置五个MU @ M Silica颗粒。为了重复上述两个步骤并制造3D微结构，是必要的布置颗粒的固定处理。在颗粒布置之后在基板上形成氟化物聚合物的薄膜以固定布置的颗粒。研究了涂膜对拉伸步骤和布置步骤的影响。发现涂膜改善了两步而不是引起干扰。绘图，布置和固定是颗粒布置过程的元素技术，并且可以通过按顺序重复这些步骤来构造3D微结构。讨论了该方法在气体传感器中的应用。
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