Fixing of Arranged Particles on Substrates by Coating Method

摘要

Silica particles of 5 #mu# m#PHI# were arrangedon CatIo3 substrates by the drawing and the developing steps, asreported in a previous paper. Fixing treatment is necessary torepeat the arranging process to produce the three-dimensional micro-structures.A thin film of fluoride polymer was formed on the substratesafter the particle arrangement to fix the arranged particles. Theeffects of the fixing treatment on the arranged particles and thearranging process were investigated. The following results were obtained.(1) Electrified patterns are formed on the substrates with anelectron beam scanning in the drawing step. More sharppatterns are obtained by performing the thin film of fluoridepolymer on the substrates. This improvement is due tosuppression of surface diffusion of the electrified charges by the film.(2) The particles are arranged by the electrostatic force in thedeveloping step. Since the electrified pattern is sharp, betterparticle arrangement can be obtained by performing the film on the substrates.(3) The film holds the adhered particles through the secondtime drawing and developing steps and the arranged particlesare scarcely affected by the fixing treatment.These results suggest that the formation of thin film offluoride polymer is effective for the fixing treatment and thatthree-dimensional micro-structures can be produced by the particle assemblage.