Integrating sensor data collection with factory host database and SPC system

摘要

Real-time collection of sensor data is required to quickly dectect problems in semiconductor process equipment. Currently, most real-time applications rely on a sensor/controller connected to a local PC. The data is collected and stored on the local PC, and in some cases, limited Statistical Plrocess Control (SPC) and alarms are provided. This solution, however, is a 'stand-alone' system and lacks integration with the factory host. To facilitate a higher degree of integration, a data management system was designed and implemented to take data directly from the sensor/controller and up load it to the factory host database. Summary data is calculated and passed up to the fab SPC system, which provides flexibility in control strategy. This data collection system is called Electronic Chart Recorder (ECR). The ECR system can display real-time data, retrieve and display historical data traces, and calculate lot statistics.