A Laser System for On-machine Measurement of the Microprofile of Ultraprecision Surface

摘要

A on-machine or on-line measurement system is described which has excellent vibration resistance, that can be used for on-line to measure the profile of optical surface, silicon plate, gyroroter etc. with the resolution of 1 A or setup on a diamond lather to measure the machining pieces with subnanometer resolution.