NONLINEAR VIBRATION OF MICROMACHINED RESONATORS WITH ATTACHED EXCITATION/DETECTION ELECTROSTATIC COMB-DRIVES

摘要

Micromachined beams are widely used as resonant structures. The electrostatic interdigitated comb-drives are commonly utilized for exciting/detecting the vibration of these resonators. Recent investigations into the analytical model of the resonator have shown that the added mass due to the comb-drive not only alters the natural frequencies of the resonator, but also changes the mode shapes of vibration. In this paper, the analytical model is extended to include the nonlinear effects due to the stretching of the beam. The generalized orthogonality condition along with the method of assumed-modes summation and the method of multiple scales has been used to study the primary and internal resonance of micro-beam resonators.